Microfabricated Elastomeric Valve and Pump Systems

CIT No. 
3016-CA-D-D
Date Issued: 
April 18, 2017
Patent Number: 
2,767,084
Inventors: 
Marc A. Unger
Hou-Pu Chou
Todd A. Thorsen
Axel Scherer
Stephen R. Quake
Abstract: